Nano-Electromechanical System

Nano-Electromechanical SystemNano-Electromechanical System
  1. With the development of NEMS ( Nano-Electromechanical System ), the size of the mechanism and electronical device was upon nano-scale .

    随着纳米电子机械系统技术的发展,用在纳米电子机械系统中的机械构件和电子元件的尺寸也达到了纳米量级。